Two amazing companies. If one wanted to own either or, I wouldn't be concerned at all.
I do prefer ASML due to the moat the company has. One would argue they have a complete monopoly on EUV machines. The benefit from this is not only the sale of those machines but the fact it is one of the only companies that can service them.
Their service business is growing at a solid clip and is the much higher margin segment of the business.
As you can tell by my portfolio, I do own a chunk of ASML and add to it on a routine basis. I think there are a lot of tailwinds for this company that has the potential to make it a long term winner. It will have a bit of volatility due to ebbs and flows of capex cycles from its major clients, but if we smooth these out over the long term, I feel it will be a dominant player in the space.